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mems mechanical sensors
Stephen Beeby
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Artech House Publishers
· Tapa Dura
mems mechanical sensors - Beeby, Stephen
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Reseña del libro "mems mechanical sensors"
The main aim of this book is to give an overview of MEMS mechanical transducers. The text focuses mainly on examples of commercial and research devices; however, attention is also given to manufacturing techniques and materials, as well as the basic principles behind the operation of these devices.
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